AFM探针描述
适用的Sample:
Other Hard Samples,Polymers,Semiconductors
适用的AFM机型:
DimensionIcon,DimensionXR
适用的Work Mode:
CAFM,peakforce tapping,SCM,sMIM
适用的Application:
Electrical
Coating 描述
| cantilever Back side coating | TiW/Au (500) |
|---|---|
| tip coating | TiW |
Tip 规格
| tip geometry | Pyramid |
|---|---|
| tip radius (Nom) | 50 ± 10nm |
| tip height | 4.5-5.5um |
| Front Angle (FA) | 35±1° |
| Back Angle (BA) | 35±1° |
| Side Angle (SA) | 35±1° |
Cantilever 规格
| cantilever geometry | Rectangular |
|---|---|
| K(Nom) | 8N/m |
| Frequency(Nom) | 75KHz |
| length(Nom) | 150um |
| thickness(Nom) | 3.6um |
| cantilever material | Silicon Nitride |
| top layer back | TiW/Au (500) |
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Frequency
Nom:
70KHz
Spring Const.
Nom:
2.9N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
Frequency
Nom:
300KHz
Spring Const.
Nom:
42N/m
Geometry
Rectangular
Tip Radius
5nm
Material
0.01 - 0.025 Ωcm Antimony (n) doped Si
Coating
B: Reflective Aluminum
